Vacuum apparatus Products and services

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Vacuum apparatus

Vacuum apparatus

  • Magnetically Suspended Turbo Molecular Pump with Integrated Control Unit TGkine series Magnetically Suspended Turbo Molecular Pump with Integrated Control Unit TGkine series
    • Catalogue

    ● Integrated controller and power supply on pump: Intergrated controller/power supply, very compact footprint. No interconnect cable/cable duct nor rack-mount needed, ease of installation and system cost saving. Integrated controller cause less strain to system design, helps system cost down. ● Well balanced performance for a wide range of vacuum processes: Wide pressure range applications, capable of pumping at high throughput. High compression ratio, low ultimate pressure. Can be started simultaneously with backing pump in series from atmosphere, shortened initial pump down time. Variable rotational speed control(110 rps - 450 rps) on-the-fly, eliminating the need for throttle value, possible system cost saving. ● Compact footprint, easy access to every function: Access for all connections, displays, and switches located on 1 side of the pump, ease of installation and system maintenance. No connection is needed on the side/back of the pump, versatile for system integration. ● Remote communication interface options: Multiple interface options and Multiple units operation available. (Parallel I/O, RS232C, RS485, Profibus, DeviceNet) Protection rating: ● IP54(standard), Rated to operate in harsh environments.

    Target industry: Semiconductors/LCD/FPD Electrical/Electronic Parts Scientific/Physics and Chemistry Instruments

    Osaka Vacuum, Ltd.

  • Oil-sealed Rotary Vacuum Pumps Oil-sealed Rotary Vacuum Pumps
    • Catalogue

    Even among other mechanical vacuum pumps able to perform compression up to atmospheric pressure, oil-sealed rotary vacuum pumps are used widely around the world as they are economical, efficient, and operable using simple equipment. Users can achieve a vacuum state using oil-sealed rotary vacuum pumps. These pumps are also combined with roots vacuum pumps to make widely-used vacuum pump units (vacuum systems) having high exhaust speeds, and are also used as roughing pumps functioning as a part of vacuum facilities. Oil-sealed rotary vacuum pumps are for a wide range of applications. They play active roles in fulfilling vacuum-related needs in areas having to do with automobiles, metals, steel,packaging, foods, medical supplies, medical treatment, electricity, electronics,semiconductors, and advanced research. 90M3/H~1800M3/H TYPE P90/P180/P222/P450/P600/P901/K30002

    Target industry: Automotive Parts Food/Beverage Metallic Products/Parts

    Osaka Vacuum, Ltd.

  • ROOTS VACUUM PUMPS ROOTS VACUUM PUMPS
    • Catalogue

    A roots vacuum pump is a vacuum pump that compresses and exhausts by ounter-rotating two-lobed rotors. This mechanical vacuum pump is also referred to as a mechanical booster when it is mounted to the front end of an oil-sealed rotary vacuum pump to increase the volume flow rate. A roots vacuum pump is normally used with a vacuum pump that can compress up to atmospheric pressure 90M3/H~12000M3/H TYPE RA100/RD302/RD600/RD1200/RD1500/RD2500/R6002/ R12001

    Target industry: Automotive Parts Food/Beverage Metallic Products/Parts

    Osaka Vacuum, Ltd.

  • Turbo Molecular Pumps TGF-SERIES Turbo Molecular Pumps TGF-SERIES
    • Catalogue

    Ball bearing type,yet it can be mounted in any position. Its compact size and light weight add greater freedom to equipment layouts. Features a rugged structure with high resistance against rapid acceleration-can be operated as the entire apparatus moves. Also resistes sudden air in-rush and other impact-a feature not previously available in conventional TMP`s.There flexible mounting-position models are available in a large variety of size. Compound Molecular Pumps 50L/S~2400L/S TYPE TG50F/TG60F/TG70F/TG220F/TG240F/TG350F/ TG450F/TG800F/TG1100F/TG1400F/TG2400F/ TG2410F

    Target industry: Metallic Products/Parts Automotive Parts Semiconductors/LCD/FPD

    Osaka Vacuum, Ltd.

  • Cylindrical Mirror Analyzer (Electron Energy Analyzer System) / KITANO SEIKI Cylindrical Mirror Analyzer (Electron Energy Analyzer System) / KITANO SEIKI

    The KCMA-2009 is comprised of (1) an ultra high vacuum head that is composed of an electron gun and electron energy analyzer and that is dedicated to the Auger Electron Spectroscopy (AES), (2) a power supply, and (3) control software. The internal electron gun measures the kinetic energy spectrum of the excited Auger electrons emitted and quantifies the elements present in the surface sample so the surface's cleanliness factor can be evaluated. Regarding investigations of solid surfaces, the Auger Electron Spectroscopy (AES) is regarded as a basic measure. In ultra high vacuum experimental devices that incorporate a great number of analysis and processing heads, the ultra high vacuum head should be as small as possible to save space. Our CMA (Cylindrical Mirror Analyzer) consists of an electron gun to excite the sample, an electron energy analyzer, which measures the electric energy emitted from the sample, and the respective power supply circuits as well as all the relevant control software. The electron gun is built inside of an electron energy analyzer and consists of a hairpin cathode, which utilizes a thoriated tungsten alloy, and an electrostatic lens. The electron energy analyzer is a CMA which has a simple structure and powerful resolution. It is composed of a spectroscope that can classify electrons with a wide variety of energies and electrons to detect the electrons after the spectroscopy. The entire system head is moved around by the linear motion drive, so when analysis is not being performed the head is pulled away from the sample. This means that interference from other devices can be avoided. By connecting the KCMA-2009 to your existing ultra high vacuum device, it is possible to smoothly use the Auger electron spectroscopy.

    Target industry: Semiconductors/LCD/FPD Electrical/Electronic Parts Precision Equipment

    KITANO SEIKI Co., Ltd.

  • Analysis System 5 Axes Manipulator / KITANO SEIKI Analysis System 5 Axes Manipulator / KITANO SEIKI
    • Catalogue

    Analysis System 5 Axes Manipulator is a high-precision multi-axial transfer mechanism which has 5 movable axes (X,Y,Z,θ,ω), corresponds to XHV (extreme high vacuum), and is suited for analysis apparatus for laboratories such as photic analysis and electro-magnetic analysis apparatus. It can transfer and manipulate the sample in vacuum precisely and reproducibly. With the optional heating unit or cooling unit, it can be used for more variety of R&D purposes.

    Target industry: Semiconductors/LCD/FPD Electrical/Electronic Parts Precision Equipment

    KITANO SEIKI Co., Ltd.

  • Ultra-High Quality Vacuum Chamber / KITANO SEIKI Ultra-High Quality Vacuum Chamber / KITANO SEIKI
    • Catalogue

    At Kitano Seiki, we manufacture a wide variety of vacuum chambers, ranging from high and ultrahigh vacuum to extreme vacuum, to suit our customers' diverse research needs. The requirements of the experiment have guided us in the choice of the most suitable shape of the vacuum chamber and the best type of stainless steel to be used. You can also finely specify the settings, such as the number, angle, position, etc., of the mounting ports of the measurement hardware and the branch hardware. In addition, our well-integrated system of service and support will fully satisfy whatever needs you may have for specialized processing. Our team will be with you every step of the way, from design to the execution of the required processing, as well as its attendant tasks. We provide surface treatment, baking treatment, cleaning, assembling, leak testing and preparing your vacuum equipment ready for launching.

    Target industry: Automotive Parts Electrical/Electronic Parts Precision Equipment

    KITANO SEIKI Co., Ltd.

  • Organic Deposition Cell / KITANO SEIKI Organic Deposition Cell / KITANO SEIKI
    • Catalogue

    This product is designed for thin film formation from materials of high vapor pressure (organic materials) and is a low-temperature cell (Organic Deposition Cell: KOD-Cell) that operates stably in low-temperature environments. KOD-Cell employs indirect heating, which achieves excellent temperature response and temperature stability.

    Target industry: Semiconductors/LCD/FPD Electrical/Electronic Parts

    KITANO SEIKI Co., Ltd.

  • Deposition system for developing organic materials (KVD-OLED Evo.Cluster) / KITANO SEIKI Deposition system for developing organic materials (KVD-OLED Evo.Cluster) / KITANO SEIKI

    The system, Organic Material Development Evaporation System is experimental equipment for organic material development. Under in-situ, the system loads possible system for transport and exchange of substrate holder and mask holder. The operation of transport system is possible for PC control. The system has six rooms. The center room has transporting robot. There are two organic evaporation rooms and one metal evaporation room each other. The substrate cleaning by RF plasma assisted “preprocessing room”. Some holder stocked system “load-lock room”. The system is standard equipment. Moreover, the automatic deposition system is possible to equip by some option. It is complete type of all automatic cluster type evaporation system.

    Target industry: Semiconductors/LCD/FPD Electrical/Electronic Parts

    KITANO SEIKI Co., Ltd.

  • Deposition system for developing organic materials (KVD-OLED Evo.3) / KITANO SEIKI Deposition system for developing organic materials (KVD-OLED Evo.3) / KITANO SEIKI

    The system, Organic Material Development Evaporation System is experimental equipment for organic material development. Under in-situ, the system loads possible system for transport and exchange of substrate holder and mask holder. The operation of transport system is possible for PC control. The system has six rooms. There is one organic evaporation room and one metal evaporation room each other. Some holder stocked system “load-lock room”. The system is standard equipment. Moreover, the automatic deposition system is possible to equip by some option. It is complete type of all automatic in-line type evaporation system.

    Target industry: Semiconductors/LCD/FPD Electrical/Electronic Parts

    KITANO SEIKI Co., Ltd.

  • Deposition system for developing organic materials (KVD-OLED Evo.2) / KITANO SEIKI Deposition system for developing organic materials (KVD-OLED Evo.2) / KITANO SEIKI

    The system, Organic Material Development Evaporation System is experimental equipment for organic material development. Under in-situ, the system loads possible system for transport and exchange of substrate holder and mask holder. The operation of transport system is possible for PLC display of touch panel. The system has three rooms. The first room is each holder stocked “load-lock room”. The second room has heating substrate system “preprocessing room”. The third room is evaporation organic / metal materials “evaporation room”. And also load lock room is possible connection grovebox.

    Target industry: Semiconductors/LCD/FPD Electrical/Electronic Parts

    KITANO SEIKI Co., Ltd.

  • Beam Flux Monitor / KITANO SEIKI Beam Flux Monitor / KITANO SEIKI
    • Catalogue

    The beam flux monitor measures beam flux of the molecular beam as a sensor in small B-A gauge. It is used in MBE system. It realizes a connection flange of the ICF-70 size by the compact design using the rotary motion drive (KMMR-34S). It is possible to modify the strokes to the specifications.

    Target industry: Semiconductors/LCD/FPD Electrical/Electronic Parts Iron and steel industry/Metal material

    KITANO SEIKI Co., Ltd.

  • Spin Supply Thin Films Courting System / KITANO SEIKI Spin Supply Thin Films Courting System / KITANO SEIKI
    • Catalogue

    Spin Supply Thin Films Courting System enables forming ferrite thin films and ultrafine particles at low temperature (3 – 9℃). It can be applied to various fields such as micro-wave devices, bio medical applications, perpendicular magnetic recording media, and so on.

    Target industry: Semiconductors/LCD/FPD Precision Equipment Metallic Products/Parts

    KITANO SEIKI Co., Ltd.

  • TEM HOLDERS / KITANO SEIKI TEM HOLDERS / KITANO SEIKI
    • Catalogue

    Kitano-Seiki Co., Ltd. provides a wide range of experimental apparatuses and devices for Transmission Electron Microscope (TEM). These apparatus are widely used not only for the research of biology, high polymer, ceramics, semiconductor, metal and so on, but also development and analysis of new products. Especially a series of TEM HOLDERs have been developed based on the original ideas hinted at customers' requirements, which enable observation with high resolution imaging of crystal morphology, crystal structures, compositions, electron state, etc. Kitano-Seki will willingly respond to customer's requests to realize original designs or special features to be actual apparatuses or devices for customers' experiment and development.

    Target industry: Semiconductors/LCD/FPD Electrical/Electronic Parts Iron and steel industry/Metal material

    KITANO SEIKI Co., Ltd.

  • DIS/DISL Series Dry Vacuum Pumps DIS/DISL Series Dry Vacuum Pumps
    • Catalogue
    • Distributor required
    • Partnership required

    ULVAC KIKO Inc. is always looking for sales agents. Please feel free to ask us. - Compact vacuum pump with great displacement volume - The highest level of ultimate pressure in dry vacuum pumps - Control water condensation by air flush

    Target industry: Semiconductors/LCD/FPD Measurement/Analytical Instruments Industrial Machinery/Devices

    Ulvac Singapore Pte Ltd.

  • DOP Series Dry Vacuum Pumps DOP Series Dry Vacuum Pumps
    • Catalogue
    • Distributor required
    • Partnership required

    ULVAC KIKO Inc. is always looking for sales agents. Please feel free to ask us. - Vacuum pump most suitable for vacuum conveyance - Compact vacuum pump with great displacement volume - Dry type vacuum pump with no oil on the wetted surface - Possible to operate at standard atmospheric pressure (1013hPA) - Simple structure and minimum maintenance

    Target industry: Semiconductors/LCD/FPD Measurement/Analytical Instruments Industrial Machinery/Devices

    Ulvac Singapore Pte Ltd.

  • DTC Series Dry Vacuum pumps DTC Series Dry Vacuum pumps
    • Catalogue
    • Distributor required
    • Partnership required

    ULVAC KIKO Inc. is always looking for sales agents. Please feel free to ask us. - Chemical type of dry vacuum pump which withstands suction of organic solvent or corrosive gas -Vacuum pump which has auto return type thermal protector and is designed with safety in mind -Vacuum pump which can operate at standard atmospheric pressure (1013hPA) - Vacuum pump which has A simple structure and requires minimum maintenance

    Target industry: Semiconductors/LCD/FPD Measurement/Analytical Instruments Industrial Machinery/Devices

    Ulvac Singapore Pte Ltd.

  • DAU/DTU Series Dry Vacuum pumps DAU/DTU Series Dry Vacuum pumps
    • Catalogue
    • Distributor required
    • Partnership required

    ULVAC KIKO Inc. is always looking for sales agents. Please feel free to ask us. - Dry type vacuum pump with no oil on the wetted surface - Hyper vacuum type of dry vacuum pump with enhanced ultimate pressure function - Can be used as a backing vacuum pump for turbo molecule pump -Vacuum pump which has auto return type thermal protector and is designed with safety in mind -Possible to operate at standard atmospheric pressure (1013hPA) - Simple structure and minimum maintenance

    Target industry: Semiconductors/LCD/FPD Measurement/Analytical Instruments Industrial Machinery/Devices

    Ulvac Singapore Pte Ltd.

  • DAP/DA/DAT Series Dry Vacuum pumps DAP/DA/DAT Series Dry Vacuum pumps
    • Catalogue
    • Distributor required
    • Partnership required

    ULVAC KIKO Inc. is always looking for sales agents. Please feel free to ask us. "Summary" - A standard type of dry vacuum pump which has great actual achievement and has achieved a low price - Dry type vacuum pump with no oil on the wetted surface - Vacuum pump which has auto return type thermal protector and is designed with safety in mind - Vacuum pump which can operate at various atmospheric pressure - Vacuum pump which has a simple structure and requires minimum maintenance

    Target industry: Semiconductors/LCD/FPD Measurement/Analytical Instruments Industrial Machinery/Devices

    Ulvac Singapore Pte Ltd.

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