Coating apparatus/Surface processing device/Related product
Removal of residues, surface reforming, and ashing of φ4 to 6 inch wafers is possible by using this new plasma cleaner. The automatic conveying mechanism contributes to prevention of wafer cracking and reduction of personnel expenses and operation time due to wafer transfer. In addition, the process chamber achieves high throughput by simultaneous processing of two wafers. 【Features】 ■Compact design：1400(W)×3000(D)×1900(H)mm ■Distribution：± 5% or less in a wafer ■Ultra-thin piezoelectric wafers such as SAW device ■Ar plasma cleaning (option) ※Please see the document for details. Please do not hesitate to contact us.
Target industry: Electrical/Electronic Parts Semiconductors/LCD/FPD Automotive Parts
This Arc-discharge-type ion plating equipment "SIA-400T" is most suitable and the state of art system for "surface cured coating films and decortive film" for tools, blades and molds.
Target industry: Electrical/Electronic Parts Machine Parts Metallic Products/Parts
ALD (Atomic Layer Deposition) forms a thin film by repeating cycles of the Atomic Layer Deposition method that forms a single atomic layer in one cycle. Enabling uniform layer control at an atomic layer level can form a thin film with high quality as well as high step-coverage.
Target industry: Electrical/Electronic Parts Optical Equipment/Parts Resin/Plastic/Rubber Products
Showa Shinku's Ion Plating Equipment using Hollow Cathode System"SIH-400T" is most suitable to form decorative films for accessories and cured coating films for tools.
Target industry: Automotive Parts Machine Parts Metallic Products/Parts
The new developed sputtering and polymerization system integrated with injection molding system SPP-SERIES enables fully automatic formation of metallic and protective films on resin substrates used in the automobile and decoration industries.
Target industry: Automotive Parts Metallic Products/Parts Resin/Plastic/Rubber Products